Bias power supply Bias-80k
Pulse voltage range: 50~1000V, peak pulse current: 50A, maximum output power: 15kW, pulse frequency range: 1~80kHz, pulse width range: 0.5~950uS, waveform interface: BNC voltage/current, module synchronization: optical fiber, industrial communication port: RS485
power supply HiPIMS-1000、HiPIMS-1500
Pulse voltage range: 200~1000V, peak pulse current: 1000A, pulse frequency range: 100~2500Hz, pulse width range: 10~500uS, DC voltage range: 200~1000V, DC maximum current: 80A, self-checking arc ignition function: Yes, module synchronization: optical fiber, waveform interface: BNC voltage/current, industrial communication port: RS485
Customized power supply HiPIMS-1000DD
Pulse power supply with different power, different waveform requirements and different performance can be customized.
P3E power supply P3E-1000
Pulse voltage range: 0~200V, peak pulse current: 1000A, pulse frequency range: 150~500Hz, pulse width range: 150~500uS, DC voltage range: 0~200V, DC maximum current: 80A, self-checking arc ignition function: Yes, module synchronization: optical fiber, waveform interface: BNC voltage/current, industrial communication port: RS485